Manufacturing Industry
FSI INTERNATIONAL UNVEILS THIRD GENERATION OZONE PROCESS.
Industrial Environment, October, 2001
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FSI International (Nasdaq:FSII), Minneapolis, has introduced its new third generation ozone process for front-end-of-line (FEOL) resist strip and post-ash clean. This new offering marks a groundbreaking advance in ozone processing through the pairing of generous economic benefits with environmentally friendly initiatives at a low cost of ownership (COO). Developed for use in the volume production of microchips, the third generation ozone process can be run on FSI's batch spray tools, including the ZETA(R) 300, ZETA(R) 200 and MERCURY(R) systems.
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