Matheson Tri-Gas Inc.(Markets plus: product showcase)(develops UltimaSorb through joint alliance with ATMI Inc.)(Brief Article)

Chemical Market Reporter, September, 2003

Matheson Tri-Gas Inc.'s electronics group has developed through a joint alliance with ATMI, Inc. a new solution for hydride abatement called Ultima-Sorb. Using a patented material to abate metal organic chemical vapor deposition process gases, especially ursine and phosphine, the company says the system offers a 20 to 50 percent reduction in abatement cost of ownership without any scrubber modifications.

Ultima-Sorb combines two special materials to optimize scrubbing capacity and efficiency while reducing heat generation of the system. Together, these materials are designed to chemically remove hydride gases at room temperature and deliver three to five times larger capacity then conventional dry abatement media.