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Dual-Arm Robot.(from Integrated Dynamics Engineering)(Brief Article)

Semiconductor International, June, 2001

DAR 300 dual-arm robot is designed to deliver high throughput with placement accuracy. It features a large payload capacity, control technology and a minimum of payload vibration. It can be used in wet bench equipment, RTP systems, ion implanters and other tools needing at least 500 wph performance. Integrated Dynamics Engineering, Westwood, Mass.

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