Wafer sorter. (Product Preview).(from Integrated Dynamics Engineering)

Semiconductor International, June, 2002

Series 9300 wafer sorter provides high-speed, precision handling and 300 mm wafer/lot ID integrity. The sorter features complete factory/host automation, with 300 mm wafers loaded, tracked, sorted, selected, merged, recombined and consolidated throughout the process. It also is fully BOLTS-compatible with all major FOUP/FOSB/OCL configurations, customized to meet any fab's requirements, can be used as a transfer tool and can handle 200 mm wafers. Integrated Dynamics Engineering (IDE), Westwood, Mass.

Booth 1525-SF

* For more information go to www.semiconductor.net/info and enter reference #203.