Standards lay groundwork for new level of communication. (Industry Watch).

Semiconductor International, January, 2003 by Singer, Peter (Judge)

Another milestone in the push to e-manufacturing was reached last month during SEMICON Japan, with the approval of a proposed SEMI standard that defines a software interface for process equipment. The Proposed Standard for Equipment Data Acquisition, SEMI document 3563, will enable equipment suppliers to better develop and test solutions for remote e-diagnostics and other types of data exchange using more powerful, high-speed communication protocols such as XML, developed for the Internet.

This new interface standard A is one of three communication interfaces being proposed by International SEMATECH (ISMT, Austin, Texas) as part of a set of EES (equipment engineering system) standards, The other two, B and C, address communication between applications, and...

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