The standard pieces of SEMI's Interface A.

Semiconductor International, July, 2005 by Rubow, Brian L.

Many industry experts foresee wafer processing equipment containing Interface A data ports as the future to improving semiconductor manufacturing productivity, because it serves as a crucial enabler for factory Equipment Engineering Systems (EES) applications, which include advanced process/equipment control (APC/AEC) and e-diagnostics. With the Interface A standards crystallizing over the past few years, experts envision EES applications as vital elements to improve quality, reduce process variation and increase overall equipment effectiveness. Through a robust Interface A port, wafer lab operations have access to a new level of detailed process, metrology, operational and other data. Previously, the restrictions of the venerable SECS/GEM data ports on tools limited...

Read the rest of this article with a Free Trial at HighBeam Research.

Premium Content Partnership | HighBeam Research provides an in-depth online archive library of reference works.