Process Monitor.(SensArray Corp )(Brief article)

Semiconductor International, October, 2006

Staff The Integral Wafer enables device makers and equipment OEMs to collect in situ process information for certain critical, harsh environment process applications. It has an embedded ultrathin sensor network and power supply within the silicon wafer substrate that allows for a thin protective cover to be laminated to the wafer to form a planar outer wafer surface on both sides.

This cover shields the embedded network from the processing environment and eliminates contamination. SensArray Corp ., Santa Clara, Calif., www.sensarray.com