AMC Standard.
Semiconductor International, March, 2007
Staff ISO 14644-8 Cleanrooms and Associated Controlled Environments -- Part 8: Classification of Airborne Molecular Contamination (AMC) assigns ISO classification levels to specify the limits of AMC concentrations within cleanrooms and associated areas. It covers the classification of AMC in terms of specific chemical species, and considers concentrations of AMC between 100 and 10-12 g/mA[thorn] under cleanroom operational conditions.
The Institute of Environmental Sciences and Technology (IEST) , Rolling Meadows, Ill., www.iest.org
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