EUV Light Source.
Semiconductor International, May, 2009
Staff
The EQ-10HR is a light source that operates at 10 kHz to simulate the requirements of high-volume manufacturing for EUV lithography implementation. The Electrodeless Z-Pinch inductively couples the current into the discharge plasma, making the plasma more stable and controllable. The plasma is confined away from source components, reducing debris and allowing long operating life. It integrates into process tools and will run continuously at pulse repetition rates of 10 kHz for many billions of pulses. Energetiq Technology Inc. , Woburn, Mass., www.energetiq.com
Premium Content Partnership |
HighBeam Research provides an in-depth online archive library of reference works.
Most Recent Technology Articles
- INTERVIEW WITH BEN BUTTERS, DIRECTOR OF EUROPEAN AFFAIRS AT EUROCHAMBRES : "A PERFECT ROAD MAP FOR EU CLUSTERS DOES NOT EXIST".
- AGENDA.(Brief article)(Conference notes)
- FIGHT AGAINST INTERNET PIRACY.
- INTERNET : AUTHORS' SOCIETIES URGE ACTION AGAINST PIRACY.
- TELECOMMUNICATIONS : BUSINESSEUROPE HOSTILE TO FURTHER CONTRACTUAL OBLIGATIONS.(Brief article)
Most Recent Technology Publications
Most Popular Technology Articles
- 3G: naughty or nice? PhoneErotica.com generates over 300 million hits per month, and rings up more minutes of use per month than MSN
- Business process re-engineering in the small firm: A case study
- Performance analysis of shell and tube heat exchanger using miscible system
- What is precision air conditioning and why is it necessary?
- Optimizing of Trichoderma viride cultivation in submerged state fermentation
