EUV Light Source.
Semiconductor International, May, 2009
Staff
The EQ-10HR is a light source that operates at 10 kHz to simulate the requirements of high-volume manufacturing for EUV lithography implementation. The Electrodeless Z-Pinch inductively couples the current into the discharge plasma, making the plasma more stable and controllable. The plasma is confined away from source components, reducing debris and allowing long operating life. It integrates into process tools and will run continuously at pulse repetition rates of 10 kHz for many billions of pulses. Energetiq Technology Inc. , Woburn, Mass., www.energetiq.com
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