Perfluoroelastomer Seals.
Semiconductor International, May, 2009
Staff
Chemraz XTR is a perfluoroelastomer that provides chemical resistance in highly corrosive fluorine environments, specifically ClF3 and NF3 at high temperatures. The perfluoroelastomer compound addresses the application challenges typically found in ALD of titanium nitride and other nitride-based film deposition with high adhesion and high chemical resistance to cleaning. The compound is suitable in static and semi-dynamic dry wafer-processing applications. It remains stable in service temperatures up to 300*C (572*F), and can be used for seals or products with bonded seals. Greene, Tweed & Co. Inc. , Kulpsville, Pa., www.gtweed.com
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