Helium Ion Microscope.

Semiconductor International, May, 2009

Staff

The Spectra detector for the Orion Plus helium ion microscope adds structural and compositional analysis capabilities to its sub-nanometer resolution imaging capabilities. This materials-characterization technique, which is similar to other ion scattering techniques, uses the properties of backscattered helium, their energy and angle, to determine the mass of the scattering nuclei within the sample. Also included in the detector package are data-processing and data-communication electronics, a data-acquisition PC and necessary mechanical, electrical and software interfaces to allow seamless integration. Carl Zeiss SMT Inc. , Peabody, Mass., www.smt.zeiss.com