Non-Destructive Hall Mobility Tester.

Semiconductor International, May, 2009

Staff

The LEI 1605 mobility tester for semiconductor and solar manufacturing processes manually measures electron mobility (EM). It uses contactless testing for process development, prototyping, low-volume and small-batch production. Researchers can measure electron mobility after each epitaxial layer deposition. With optional upgrades, the unit will measure electron mobility in the range of ~300-20,000 cm2 /Vsec, will measure sheet resistance from ~100 */square to 3 k*/square, and possesses mapping capability. Lehighton Electronics Inc. , Lehighton, Pa., www.lehighton.com