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EE-Evaluation Engineering, May, 2005
The AeroBar Model 5225, made of clean-room-compatible materials and designed to handle the requirements of in-tool ionization, neutralizes electric charge on wafers to comply with E-78 Level 1. Both the Model 5225 and its Interface Module Model 5200-IM6T are CE and NRTL-certified and comply with SEMI S-2 specifications.
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Input is 24 VAC, 50/60 Hz, 1-W typical, received from the interface module. The AeroBar operates in the pulsed DC, steady-state DC, or standby mode and comes in three lengths: 35.7, 55.6, and 75.5 inches. Ion Systems, www.rsleads.com/505ee-193
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