300mm thickness and composition metrology for ultra-thin films.(MANUFACTURING)

EDN Asia, November, 2005

Thermo Electron Corporation's fully automated Theta 300XT tool features twin loadports and full host integration and pattern recognition for measurement of product wafers. Them 300XT features 200 and 300mm wafer mapping of thickness, elemental and chemical uniformity, coupled with non-destructive depth profiling to determine interface chemistry.

Thermo Electron Corporation www.thermo.com/surfaceanalysis [ILLUSTRATION OMITTED]

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