Pulse Thermal Processing Aids Flexible Device Fab.

Nanoparticle News, March, 2006

By controlling materials at the nanoscale, Oak Ridge National Laboratory (ORNL) researchers believe they can greatly improve manufacturing processes of products ranging from solar cells to computers to flat-panel displays.

At the center of the optimism is a 750-kilowatt radiant plasma arc lamp that boasts 3,000 times higher heating rates and three times higher processing temperatures than those possible with conventional technologies. The lamp located at ORNL, is designed and developed by Mattson Technology, a leading supplier of advanced process equipment used to manufacture semiconductors. It is capable of heating a surface at a rate of 1 million degrees Fahrenheit per second.

"More importantly, the lamp achieves those laser power densities over...

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