Manufacturing Industry

Thin-film shape memory alloy actuates MEMS devices. (Metals).

Advanced Materials & Processes, July, 2002

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A nickel-titanium (Nitinol) shape-memory alloy (SMA) deposited in thin films onto polished silicon substrates, has reportedly been developed by the TiNi Alloy Co., San Leandro, Calif., with funding from the Missile Defense Agency (formerly Ballistic Missile Defense Organization). This thin film of Nitinol can then be micro-machined via micro-electromechanical systems (MEMS) photolithography and selective etching techniques.

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When an electric current of 50 to 150 milliamperes is passed through the SMA actuator, it produces a force of 10 J/[cm.sup.3] per cycle. That is said to be about ...

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Manufacturing Industry

Thin-film shape memory alloy actuates MEMS devices. (Metals).

Advanced Materials & Processes, July, 2002

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