Manufacturing Industry

Tribological coatings for LIGA MEMS: plasma-enhanced chemical vapor deposition has been applied to coat micro-electromechanical systems fabricated by a microlithography-based process known by its acronym as LIGA.

Advanced Materials & Processes, December, 2002 by Prasad, Somuri

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Many techniques are suitable for depositing tribological coatings on conventional machine elements, but the miniature nature of micro-electromechanical system (MEMS) elements presents a tough challenge to the coatings community. Handling of individual parts is impractical, and applying coatings by such techniques as resin bonding and burnishing is not possible.

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Physical vapor deposition is a line-of-sight process, making it difficult to deposit material on the sidewalls where it is needed. Chemical vapor deposition of tribological coatings such as diamond, though conformal in nature, ...

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Manufacturing Industry

Tribological coatings for LIGA MEMS: plasma-enhanced chemical vapor deposition has been applied to coat micro-electromechanical systems fabricated by a microlithography-based process known by its acronym as LIGA.

Advanced Materials & Processes, December, 2002 by Prasad, Somuri

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