Ion beam enhanced deposition: ion beam enhanced deposition is capable of depositing a wide range of coatings with a high degree of precision and uniformity.

Ion beam enhanced deposition (IBED), also termed ion beam assisted deposition (IBAD), is a thin film technique that allows deposition a variety of optical, dielectric, semiconductor, and tribological coatings. The nature of the process enables deposition of coatings having a wide range of metallurgical compositions, and with a high degree of control over nanostructure. Film-substrate adhesion is achieved without the external application of heat, and processing temperatures can be held below 93[degrees]C (200[degrees]F). These process features are important for optical and ...