Electron backscattered diffraction: an EBSD system added to an SEM is a valuable new tool in the materials characterization arsenal.

Advanced Materials & Processes,  May, 2004  by Maitland, Tim

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Electron backscattered diffraction (EBSD) is the technique by which an SEM can be used to evaluate the microstructure of a sample based on crystallographic analysis. It is a quantitative technique that reveals grain size, grain boundary character, grain orientation, texture, and phase identity.

The technique enables analysis of centimeter-sized samples with millimeter-sized grains, as well as thin films with nanograins. The nominal angular resolution is ~0.5 degree, and spatial resolution is related to the resolution of the SEM, but 10 nm grains can be distinguished in modern field ...

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