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Analysis system conducts NDT of MEMs, semiconductors.(Testing/Analysis)

Advanced Materials & Processes,  June, 2004  

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An X-ray inspection and failure analysis system that can carry out nondestructive testing processes and resolve the most minute details has been announced by Phoenix X-Ray Systems and Services Inc., Camarillo, Calif. Called Nanome X, the system is based on a high-powered Nanofocus tube that can be operated in four modes, covering the whole range from nanometer resolution to high-power radiation.

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This allows resolution to an extreme level of detail, down to 200-300 nm. The same tube is infinitely variable up to 160 kV, and can also power up to 50 W, making it possible to see through ...

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