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Milestone resolution achieved in electron-beam imaging.(TESTING/ANALYSIS)
Advanced Materials & Processes, May, 2005
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A record resolution of 0.8 Angstrom (0.08 nanometer) in electron beam microscope imaging has been achieved by researchers at Carl Zeiss SMT, Oberkochen, Germany. The milestone was reportedly reached using a newly developed 200-kV field-emission ultra-high resolution transmission electron microscope (UHRTEM), equipped with electron optical components for aberration-correction and filtering.
The system, partly co-developed by CEOS GmbH in Heidelberg, Germany, integrates several advanced components into a new UHRTEM platform. Integration of the components, such as electron beam ...
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