New developments in FESEM technology.(TECH SPOTLIGHT)(Cover Story)

Advanced Materials & Processes,  August, 2005  by Vermeulen, Jan Pieter

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Scanning electron microscopy is an analytical technique in which an image is formed on a cathode ray tube whose raster is synchronized with the raster of a point beam of electrons scanned over the surface of a specimen. The brightness of the image at any point is proportional to the scattering of the electrons from the beam at that point on the surface, or by secondary emissions of electrons from the point.

The scanning electron microscope (SEM) provides two outstanding improvements over the optical microscope: it extends the resolution limits up to 30,000X or as high as 60,000X, and ...

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