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Advances in sputter coating: rotatable sputter targets and advanced rotatable magnetrons will further transform the coating marketplace through increased material efficiency and cost reductions.

Advanced Materials & Processes,  March, 2006  by Luys, Steven

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Magnetron sputtering is a vacuum coating process for depositing thin films on glass. Since their invention in the late 1960s, sputtering electrodes have undergone a developmental revolution. The most significant technological advances are rotating cylindrical magnetrons (Fig. 1) and advanced rotating cylindrical sputter targets (Fig.

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2). These two parallel developments have enabled manufacturers to boost coating throughput and reduce cost, while maintaining layer quality and thickness consistency. [FIGURE 1 OMITTED] This article shows that rotatable magnetron sputtering is the ...

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