Manufacturing Industry
NEC Tokin develops smallest multiplayer piezoelectric actuator.(Electronics)
New Materials Japan, July, 2004
NEC Tokin Corporation has developed what it says is the world's smallest multilayer piezoelectric actuator.
Piezoelectric actuators convert electrical signals into mechanical ones for fine control. The devices are widely used in semiconductor-manufacturing equipment to adjust valves and control the flow of gases, and to adjust the positions of wafers on photolithography systems. The actuators are also finding increasing uses for the focal adjustment mechanisms of digital cameras and camera phones.
Most of the piezoelectric actuators now used for semiconductor-manufacturing equipment are 5 mm square, and those used in digital cameras are around 1 mm. Until now, NEC Tokin's smallest multilayer piezoelectric actuator measured 0.8 mm.
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