Wide tuning range RF-MEMS varactors fabricated using the polyMUMPs foundry.(Technical Feature)(RF-microelectromechanical system variable capacitors, Polysilicon Multi-user MEMS Process)

Microwave Journal, August, 2003 by Best, W. Scott; De Los Santos, Hector J.; El-Gamal, Mourad N.; Tsang, Tommy K.

Semiconductor varactor diodes are widely used throughout the electromagnetic spectrum, but their performance limits their applications. One technology being pursued by industry and academia as a potential solution to these problems is RF-MEMS varactors. This article introduces the reader to fundamental device research conducted at McGill University concerning the performance limitations of RF-MEMS varactors fabricated in the commercially available PolyMUMPs (Polysilicon Multi-user MEMS Process) foundry. Several varactors were designed, fabricated and characterized, which demonstrated wide capacitance variations (49 to 433 percent) and high Q-factors (Q = 25 to 90) for devices operating at 2.4 GHz. The issues and procedures presented here are easily applied to the...

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