Manufacturing Industry
Rare oxide thin films.(COATINGS)
Advanced Ceramics Report, March, 2006
Thin films of a rare earth oxide, yttrium-scandium-oxide (YSc[O.sub.3]), have been made by a team of scientists from Finland and Estonia.
Specifically, Dr Jaakko Niinisto and co-workers at the Helsinki University of Technology, Finland, and the University of Tartu, Estonia, prepared thin films of YSc[O.sub.3] using an atomic layer deposition (ALD) process. They found they could control the films' composition and thickness more easily and at lower temperatures than those needed in other processes, the scientists state.
The films had a range of electrical properties, with potential usage in semiconductor devices or gas sensors.
Dr Niinisto now hopes to develop the ALD processes for other rare earth metals and related phases, as well as to...
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