Detection and classification of defect patterns on semiconductor wafers

IIE Transactions, Dec, 2006 by Chih-Hsuan Wang, Way Kuo, Halima Bensmail

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Biographies

Chih-Hsuan Wang received a PhD. in Operation and Technology Management from the National Taiwan University in 2005. He received a B.S. in Electronics Engineering from the National Chiao Tung University in Taiwan in 1993 and an M.S. in Electro-Optical Engineering from the National Taiwan University in 1995. Before he completed his Ph.D degree, he was awarded funds by the Taiwan National Science Council and the Education Ministry to support his Exchange Doctoral research in the USA. He has been a visiting scholar at Texas A & M University and a research scholar at the University of Tennessee. While at the University of Tennessee, he was involved in the NSF project "Defect pattern recognition on semiconductor wafers". He is now an Assistant Professor at Ming Chuan University and his current research interests include data mining, pattern recognition, signal processing, and image processing.