Nikon Precision ships first worldwide measurement system to Rockwell; System offers three times the performance for 0.25 micrometer IC development

Business Wire, Jan 23, 1995

BELMONT, Calif.--(BUSINESS WIRE)--Jan. 23, 1995--Nikon Precision Inc. (NPI) announced Monday the first worldwide delivery of their new Laser Interferometric X-Y Measuring System to the Rockwell site in Newport Beach, Calif.

The Nikon XY-5i will be used to measure precisely the location of patterns on advanced photomasks and reticles used in the production of integrated circuits. Financial details were not disclosed.

The Nikon XY-5i, with a breakthrough performance in precision measurement that is two-three times better than existing systems, has a 10 nm pattern coordinate measurement repeatability spec necessary for the production of today's advanced ICs. Current X-Y measurement systems are not precise enough to meet the demanding needs of the photomask makers as they are faced with the challenges of measuring the precise placement of patterns on photomasks and reticles.

"We found that X-Y measurement systems are becoming more crucial as both IC design and lithography equipment push the barriers of large scale integration," explained David Huchital, president of Nikon Precision. "Because of the flexibility of the new Nikon XY-5i, photomask makers will be relying on its technology well into the next century."

Nikon Precision Inc., Belmont, is the North American subsidiary of Nikon Corporation, a leading supplier of microelectronic manufacturing equipment. In the Americas, Nikon Precision provides service, training, technical support, sales, and marketing for Nikon's equipment serving the wafer, photomask, flat panel display, and thin film magnetic head industries. In Europe, Nikon Precision Europe (NPE), Langen/Frankfurt, Germany, provides the same support. Nikon offers the most extensive selection of production-worthy steppers in the industry, including g-line, i-line, and excimer laser DUV products.

CONTACT: Nikon Precision Inc., Belmont

Ann Dennis, 415/508-4674

Martell Communications

Colleen Martell, 408/275-6231