New MaxAktiv Product Line Launched by Integrated Dynamics Engineering

Business Wire, July 29, 1997

WOBURN, Mass.--(BUSINESS WIRE)--July 29, 1997--

IDE Offers a Complete Family of Active Vibration Isolation Systems

for Semiconductor Lithography and Metrology Applications

Integrated Dynamics Engineering (IDE), a global leader in the design and production of vibration isolation systems for semiconductor lithography and metrology applications has unveiled MaxAktiv(tm), a comprehensive new family of active vibration control systems featuring both feedback and feedforward technologies that virtually eliminate vibration in X-Y moving stages.

For semiconductor lithography, MaxAktiv systems enable OEMs to move greater masses, at faster speeds, with incredibly shorter settling times, to achieve record-breaking throughput. For metrology, MaxAktiv technology delivers unprecedented stability and greater resolution in far less time than previously possible.

Featured in the MaxAktiv family debut from IDE are four major series of products: TCN, ETC, PTCA, and ATC. In addition, three new "brains" for these active systems, the digital signal processor (DSP)-based controllers MaxCon 1000, MaxCon 2000, and MaxCon 5000, and IDE's five new MaxAktiv linear force actuators, are included in this worldwide new product launch, the largest in IDE's history.

Each series in the new MaxAktiv family (which many industry insiders are calling "the most stable family in the world") is designed to meet the highly specialized vibration isolation needs and budget requirements of a broadg-mounted or piezoelectric active vibration conTCN Series, with active electronic vibration conthography applicat ions, the ATC Series aggressively pushes the performance envelope in the milliHerz frequency range.

Another important feature of the MaxAktiv family is its modular configuration. This flexibility built into the MaxAktiv concept provides a matrix of solutions to fit virtually every OEM's requirements in semiconductor lithography and metrology.

According to Peter Heiland, president and founder of IDE, "Our MaxAktiv family is the result of years of working closely with OEM customers focused on semiconductor lithography and metrology. We saw their needs first hand and answered the challenge with MaxAktiv technology. Our unique feedforward techniques and broad price/performance range make IDE well positioned for the 300mm revolution."

IDE, leaders in environmental disturbance controls, has headquarters in North America near Boston and European headquarters outside Frankfurt, Germany, along with sales offices or representatives worldwide. For more information on IDE and the new MaxAktiv family, visit the IDE home page at http://www.ideworld.com

CONTACT: Integrated Dynamics Engineering

Bob Jaczko, (617) 938 5120