New TurboPlus Vacuum Pumping System Increases Process Uptime

Business Wire, July 13, 1998

SAN FRANCISCO--(BUSINESS WIRE)--July 13, 1998 - CTI-Cryogenics, a division of Helix Technology Corporation (HELX), announces the introduction and demonstration of the On-Board(R) TurboPlus vacuum pumping system at Semicon West 1998.

On-Board TurboPlus High Vacuum Pumps offer the process advantages of throughput pumping and the uptime benefits of high-speed water vapor pumping, integrated into a compact package with a single, easy to use interface. The integrated pumping stack is optimized to reduce footprint and maximize flexibility.

The TurboPlus microprocessor communicates directly to both the turbopump controller and the waterpump, coordinating operation. Preprogrammed routines, tailored by the user, provide safe automatic startup, shutdown, regeneration and power failure recovery. Control options include local or remote keypad, RS-232, or easy integration into the On-Board vacuum network.

Like all CTI-Cryogenics' products, On-Board TurboPlus systems are backed by GUTS(R), our rapid response customer support program, which provides immediate, expert technical support to users around the globe, 24 hours a day, 365 days a year.

In addition, CTI-Cryogenics welcomes Granville-Phillips; the newest member of the Helix corporate family, through a demonstration that connects, controls and monitors a CTI TurboPlus system with Granville-Phillips advanced vacuum measurement products in the CTI-Cryogenics booth (North Hall #5968) and in the Granville-Phillips booth (South Hall #1709). Visitors to either booth can witness the integrated vacuum system being monitored remotely.

CTI-Cryogenics is recognized throughout the world as a leading producer of innovative products based on cryogenic and vacuum technology. CTI-Cryogenics is the vacuum supplier of choice to the world's leading vacuum-processing equipment manufacturers, and to virtually every semiconductor and integrated circuit producer in the US, Europe, and the Pacific basin. CTI-Cryogenics' Customer Support Centers, located throughout the world, deliver an unparalleled level of support to an installed base of over 40,000 systems.

   CONTACT:  Helix Technology Corporation,
              Sharon McAvoy, (508) 337-5112