Ebara Technologies Introduces Next-Generation Dry Vacuum Pump Series; AAS Series Offers Increased Process Handling Capabilities and Reduced Energy Usage

Business Wire, June 2, 1999

SACRAMENTO, Calif.--(BUSINESS WIRE)--June 2, 1999--

Ebara Technologies' Components Division today introduced the AAS Series of dry vacuum pumps as the next generation of its extensive line of dry mechanical pumps. Building on the AA Series introduced last year, the new dual stage screw pumps are designed to provide customers with increased process handling capabilities and lower energy usage.

The AAS Series combine screw-type main pumps and Roots-type booster pumps to enable rough vacuum capabilities for semiconductor process chambers and backing for both turbo and cryo pumps. The primary applications of these pumps are large particulate generating processes in which excess amounts of byproducts are handled by the rough vacuum pump - specifically, low pressure chemical vapor deposition (LPCVD) nitride, tungsten CVD, phosphorus silicate glass (PSG) and borophosphorus glass (BPSG) deposition. The pumps also feature a two-stage screw for reduced power consumption, a patented zero theoretical error screw and NiResist, a chromium-rich iron alloy that offers corrosion resistance for the screw and pump casing.

"The AAS Series addresses the semiconductor industry's need for advanced products which raise productivity levels while driving down the overall cost. In addition, these pumps are compatible with next-generation production demands," commented Rich Ward, Ebara Technologies' engineering manager. "These pumps are the latest addition to Ebara Technologies' full suite of products, all of which raise the manufacturing capacities of its customers."

Reducing both the overall operating cost and CO2 emissions, the AAS Series' compact, space saving design makes the pumps ideal for heavy-duty semiconductor manufacturing applications. The series features eight models - AAS10N, AAS20N, AAS40WN, AAS70WN, AAS100WN, AAS200WN, AAS300WN and AAS400WN. The pumps feature an electronic control system and offer a liquid crystal display (LCD) panel that displays motor current, water flow, nitrogen flow and motor and pump casing temperatures.

The AAS10N and AAS20N feature two counter rotating, two-stage screws mounted in a single casing with an individual DC brushless motor driving each screw and operate at 35 CFM and 71 CFM, respectively. The remaining models are dual-module pumps - combining a single-stage, two-lobe Roots booster pump with a two-stage main pump to provide both a higher pumping speed and lower ultimate pressure. The AAS4OWN operates at a pumping speed of 148 CFM, the AAS70WN at 247 CFM, the AAS100WN at 353 CFM, and the AAS200WN at 635 CFM.

Introduced last year for light-duty applications, the AA Series is Roots-type vacuum pumps that provide the same rough vacuum and backing capabilities as the AAS Series. The pumps enable the virtual eradication of start up "inrush" current, booster pump starts at atmospheric pressure and consistent pump rotational speed, regardless of input frequency. In tandem, these features reduce the overall energy consumption, which means both a lower operating cost and lower greenhouse gas generation for the user.

Both the AA and AAS Series feature timing gears that synchronize the non-contact rotors and nitrogen-purged, labyrinth shaft seals that separate the lubricated gears and bearings from the rotor casing. Control interface panels are available as either pump-mounted or wall-mounted.

The AAS Series dry pumps will be displayed at SEMICON West 99, being held July 12-14 at the Moscone Center in San Francisco (Booth No. 6382, North Hall).

About Ebara Technologies Inc.:

Ebara Technologies Inc. is a subsidiary of Ebara Corporation, a Japanese company founded in 1912, which provides a wide range of technology, including equipment, systems and services for water, air and the environment. Ebara Technologies is a leading global provider of vacuum pumps and advanced wafer-processing equipment for clean environments within the semiconductor industry. Specifically, Ebara Technologies manufactures a full line of dry mechanical, cryopump systems and associated monitoring systems. The company's offerings also include cryo-turbo and turbomolecular pumps, as well as ozone systems, environmental filters (EPIX), exhaust management systems and wafer processing capital equipment. Additional information about Ebara Technologies and its products can be found on the World Wide Web at http://www.ebaratech.com.