ASM Lithography Holding N.V. And Silicon Valley Group, Inc. Confirm That CFIUS Will Conduct a 45-Day Review

Business Wire, March 7, 2001

Business Editors

VELDHOVEN, The Netherlands & SAN JOSE, Calif.--(BUSINESS WIRE)-- March 7, 2001

ASM Lithography Holding N.V. (ASML) and Silicon Valley Group, Inc. today confirmed that the Committee on Foreign Investment in the United States (CFIUS) has notified the parties that it will conduct a 45-day review, under the Exon-Florio review process, of the potential national security concerns, if any, associated with the planned merger between Silicon Valley Group and ASML.

Doug Dunn, Chief Executive Officer of ASML, said, "We are obviously disappointed by this brief delay but pledge to work closely and cooperatively with the U.S. Government in its review. We are optimistic that upon completion of this review, we will be in a position to close this merger promptly."

Exon-Florio is the common name for the review process the U.S. government uses to screen acquisitions of U.S. companies such as Silicon Valley Group by foreign entities such as ASML. The review, which is performed by the Committee on Foreign Investment in the United States, is authorized by the Exon-Florio Amendment to the Defense Production Act of 1950. Successful completion of an Exon-Florio review will provide a safe harbor for the transaction from any U.S. governmental interference based on national security concerns.

For more information about the merger agreement and the combining companies, please see the October 2, 2000 press release announcing the transaction at www.asml.com or www.svg.com and the proxy statement-prospectus related to the merger on file with Securities and Exchange Commission and available at www.sec.gov.

About ASML

ASML, founded in 1984, is a world leader in advanced lithography systems that are essential in the fabrication of integrated circuits. The company is publicly traded on both the Euronext Amsterdam N.V. and the Nasdaq Stock Market(R) under the symbol "ASML". Visit the company's web site at www.asml.com for more information.

About SVG

SVG, headquartered in San Jose, California, was founded in 1977 and is a leading supplier of wafer processing equipment for the worldwide semiconductor industry. The company designs, manufactures and markets technically sophisticated equipment used in the primary stages of semiconductor manufacturing. Its products include: photoresist processing equipment; oxidation, diffusion and low-pressure chemical vapor deposition processing systems; atmospheric pressure chemical vapor deposition systems; lithography exposure tools that use step-and-scan technology; and precision optical components and systems. The company's web address is www.svg.com.

In connection with the proposed transaction, ASML has filed a registration statement on Form F - 4 and SVG has filed a proxy statement - prospectus, each with the Securities and Exchange Commission. Investors and security holders are advised to read the registration statement and the proxy statement - prospectus when they become available because they will contain important information. Investors and security holders may obtain a free copy of the proxy statement - prospectus and other documents filed by SVG with the Securities and Exchange Commission at the Securities and Exchange Commission's web site at www.sec.gov. Free copies of the registration statement and other documents filed by ASML with the SEC may be obtained from ASML by directing a request to ASML, Attention: Franki D'Hoore 31( 40) 268-3938. Free copies of the proxy statement - prospectus and other documents filed by SVG with the SEC may also be obtained from SVG by directing a request to SVG, Attention: Manager of Investor Relations 1(408) 467-5870.

"Safe Harbor" Statement under the U.S. Private Securities Litigation Reform Act of 1995: This press release contains certain "forward - looking " statements within the meaning of the Private Securities Litigation Reform Act of 1995. Investors are cautioned that such forward-looking statements involve significant risks and uncertainties regarding the Exon-Florio process and the successful completion of the merger, including and without limitation: the inability to obtain regulatory approvals; actions of the U.S., foreign and local governments; the economic environment of the semiconductor industry; and the general economic environment. More detailed information about these factors is set forth in the reports filed by ASML and SVG with the Securities and Exchange Commission. Neither ASML nor SVG is under any obligation to (and expressly disclaims any such obligation to) update or alter its forward - looking statements, whether as a result of new information, future events or otherwise.