Timbre Technologists Receive Prestigious 2001 Best Paper Award From The IEEE Transactions On Semiconductor Manufacturing

Business Wire, Oct 15, 2002

Business Editors & High-Tech Writers

SAN JOSE, Calif.--(BUSINESS WIRE)--Oct. 15, 2002

Today, a team of Timbre technologists, Dr. Xinhui Niu, Dr. Nickhil Jakatdar, Junwei Bao, and Dr. Costas J. Spanos, were presented with the 2001 IEEE Transactions on Semiconductor Manufacturing (T-SM) Best Paper award at the ISSM conference in Tokyo.

Professor Dave Hodges, Chair of the T-SM Steering Committee and Founding Editor, presented the award to the authors.

The IEEE Transactions on Semiconductor Manufacturing Best Paper Award is chosen based on accuracy, originality, and importance of the technical concept, as well as quality and readability of the manuscript. The T-SM Editorial Board presents the award to the authors of what they consider to be the most outstanding paper published during the year. The editors also consider the potential or immediate impact the work could have on the semiconductor manufacturing industry.

The award-winning paper explores the idea of specular spectroscopic scatterometry, which is designed to measure the zeroth-order diffraction response at a fixed angle of incidence and multiple wavelengths. This mechanism allows the use of existing thin-film metrology equipment, such as spectroscopic ellipsometers, to accurately extract topographic profile information from one-dimensional (1-D) periodic structures.

About Timbre Technologies Inc.

Timbre Technologies is the developer of breakthrough metrology technology, using penetrating broadband light to non-destructively profile semiconductor device structures. This technology, Optical Digital Profilometry(tm) (ODP), has quickly become the most widely accepted optical approach for process improvement, exceeding the ITRS Roadmap for many future nodes. In production at leading memory and logic device manufacturers around the world, ODP is used as a stand-alone solution, and is now also being integrated into TEL process tools for a wide variety of applications.

Timbre Technologies Inc., a wholly owned subsidiary of Tokyo Electron Limited (TEL), develops, manufactures, and markets advanced software solutions for the semiconductor and other solid state industries. www.timbrecom.com