Therma-Wave to Present at Silicon Valley Bank Tech Investors Forum

Business Wire, Sept 1, 2004

FREMONT, Calif. -- Therma-Wave, Inc. (Nasdaq:TWAV), a worldwide leader in the development, manufacture and sale of process control metrology systems used in the manufacture of semiconductors, today announced that it will be presenting at the inaugural Silicon Valley Bank Tech Investors Forum being held in San Francisco, California on September 8 and 9, 2004. Mr. Boris Lipkin, president and chief executive officer will represent the Company.

Silicon Valley Bank Tech Investors Forum

Where:   The Ritz-Carlton Hotel
         600 Stockton Street
         San Francisco, California

When:    September 9, 2004 at 1:20 p.m. (Pacific Daylight Time)

A live audio webcast and recording of Mr. Lipkin's presentation will be available online at: http://w.on24.com/r.htm?e=8194&s=1&k=D6662B022EB8666C2B15222E530CA635

About Therma-Wave, Inc.

Since 1982, Therma-Wave, Inc., has been revolutionizing process control metrology through innovative proprietary products and technologies. The company is a worldwide leader in the development, manufacture, marketing and service of process control metrology systems used in the manufacture of semiconductors. Therma-Wave currently offers leading-edge products to the semiconductor manufacturing industry for the measurement of thin films; critical dimensions and profile of IC features; monitoring of ion implantation; and for the integration of metrology into semiconductor processing systems. For further information about Therma-Wave, Inc., access the web site at: http://www.thermawave.com.