Axcelis Names Industry Veteran Marc Levine Senior Vice President of Advanced Development and Customer Support; Levine Brings Extensive Semiconductor Experience to Support Axcelis' Advanced Technology Development

Business Wire, July 21, 2005

BEVERLY, Mass. -- Axcelis Technologies, Inc. (NASDAQ: ACLS), has named Marc Levine senior vice president of advanced development and customer support. Levine will oversee all of the company's development and support activities, including advanced technology development, systems engineering, software and customer support for Axcelis' industry-leading ion implant, rapid thermal processing, cleaning and curing product lines. He reports to Mary Puma, chairman and CEO of Axcelis.

"Marc brings a unique blend of experience, knowledge and skills, which will be a tremendous asset to Axcelis," Puma said. "His breadth of technology leadership and business process excellence will enhance our ability to offer customers the best in technology and quality."

Levine joins Axcelis after 25 years with Teradyne, a market leader in providing automatic test equipment to the semiconductor industry. Most recently, Levine served as Teradyne's vice president of worldwide field operations, where he was responsible for all aspects of sales, applications engineering and customer service. Prior to this, he held various executive and engineering positions, including vice president of enabling technology, vice president and division general manager, and division software manager. Levine also served as the company's manager of Total Quality Management.

Levine holds a bachelor's degree in computer science and electrical engineering from Massachusetts Institute of Technology and a master's degree in computer engineering from Stanford University.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.