Axcelis Names Kirk Pond to Board of Directors; Fairchild Semiconductor Chairman Brings 35 Years of Experience in Semiconductor and Electronics Industries

Business Wire, Feb 6, 2006

BEVERLY, Mass. -- Axcelis Technologies, Inc. (NASDAQ: ACLS) today announced that Kirk Pond has joined the company's board of directors, bringing more than 35 years of management experience in semiconductor manufacturing and technology development to the organization.

"We are very pleased to welcome Kirk Pond to our board of directors," said Mary G. Puma, chairman and CEO of Axcelis Technologies. "His vast management experience and in-depth knowledge of the semiconductor industry will be great assets to our board. We look forward to Mr. Pond's contributions as we lead Axcelis to the next level of growth."

Pond is chairman of the board of directors of Fairchild Semiconductor International, Inc. Previously, he held the position of president and chief executive officer. Before Fairchild's separation from National Semiconductor, Pond held several executive positions with National Semiconductor, including executive vice president and chief operating officer. Pond has also held executive management positions with Texas Instruments and Timex Corporation.

In addition to Fairchild Semiconductor, Pond is on the board of directors of the Federal Reserve Bank of Boston and Wright Express Corporation, where he also serves as chairman of the compensation committee.

Pond holds a bachelor's degree in electrical engineering from the University of Arkansas, as well as a master's degree in business from the Wharton School of the University of Pennsylvania.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.