Tokyo Electron Announces New 300mm Single Wafer Cleaning Tool, CELLESTA™+

Business Wire, Dec 3, 2007

TOKYO -- Tokyo Electron Limited (TEL) (TOKYO: 8035) today announced that the company has begun accepting orders for the CELLESTA[TM]+, TEL's newest 300mm single wafer cleaning tool. Offering high productivity and optimal performance, the CELLESTA+ represents TEL's continuous investment in advanced surface preparation technology.

Based on TEL's market-leading coater/developer CLEAN TRACK(TM) LITHIUS Pro(TM) platform, the CELLESTA+ delivers high reliability, process performance and throughput for the most advanced critical cleans for the 45nm technology node and beyond. The advanced single wafer cleaning system has a 12-process spin chamber configuration, enabling a throughput of 333 wafers per hour. The system also includes two important features to reduce overall system footprint and maximize performance: a new compact spin unit design and onboard chemical supply.

The CELLESTA+ provides two key features for enabling high performance for next generation critical cleaning applications. First, TEL's original advanced IPA drying technology eliminates the generation of watermarks caused by HF-last processes and pattern collapse damage that is typically associated with surface tension gradient drying techniques on high aspect ratio features, such as DRAM capacitors. Second, CELLESTA+ employs an enhanced atomized spray (AS3), which provides a large process window for high particle removal efficiency (PRE) with no pattern or surface structure damage.

"With CELLESTA+, TEL offers a complete suite of batch and single wafer surface preparation systems. CELLESTA+ joins the EXPEDIUS+, providing our customers with a range of tooling and process options to meet the increasing challenges faced in the surface preparation processing arena," said Masaaki Hata, VP and General Manager of TEL's Surface Preparation Systems Business Unit.

About TEL

TEL, established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL is strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange. www.tel.com