Rudolph's DMSVision Software Improves Yield in Advanced 300 mm Memory Fabs

Business Wire, Sept 17, 2007

Fab-wide Data Management System--a Platform for Higher Yields

FLANDERS, N.J. -- Rudolph Technologies, Inc. (NASDAQ:RTEC), a worldwide leader in high-performance process control metrology, defect inspection and data analysis for the semiconductor manufacturing industry, announced today that two 300 mm fabs have installed Rudolph's DMSVision([TM]) fab-wide software systems for yield management and control. The two major memory manufacturers are running advanced processes at the 70 nm node, with one moving to 45 nm in 2008. DMSVision provides a central facility for collection, storage and analysis of inspection and metrology data throughout the fab, allowing engineers to quickly detect and correct yield-robbing defects and process excursions. Faster response and more efficient analysis maximizes the yield benefits derived from inspection and metrology investments.

Building on Rudolph's unique market position in both front- and back-end, DMSVision accommodates a broad range of data sources and offers the most sophisticated global analysis tools of any currently-available yield analysis system. "DMSVision continues to be a building block for advanced and mature fabs to increase productivity," said Mike Plisinski, vice president and general manager of Rudolph's Data Analysis and Review Business Unit. "When it was introduced some fifteen years ago, it was the first commercially-available yield management system. Now it is being chosen over well-established products by some of the most advanced fabs in the world. This reflects our commitment to the changing needs of the market, our continued investment in the product over its lifetime, as well as a company-wide focus on providing superior yield management solutions for our customers."

DMSVision is a comprehensive yield management system that can accommodate process performance data from any source in the fab. Its intelligent sampling and analysis capabilities improve the efficiency of metrology and inspection operations by allowing engineers to make better decisions with fewer measurements. For example, automatic identification of CMP scratches, clusters, repeaters, adders and previous layer (nuisance) defects eliminates them from the review process and maximizes the time spent on critical new defects. Automated reporting and real-time alarms shorten response times and reduce the amount of product put at risk by a process excursion. In addition, DMSVision's exceptional track record, rich feature set and low cost-of-ownership make it attractive to smaller manufacturers who want to upgrade legacy yield management systems.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

Safe Harbor Statement

This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act"). In some cases, you can identify those so-called "forward-looking statements" by words such as "may," "will," "would," "should," "expects," "plans," "anticipates," "believes," "feels," "estimates," "predicts," "potential," or "continue," or the negative of those words and other comparable words. Rudolph wishes to take advantage of the "safe harbor" provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph's control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph's business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph's Form 10-K report for the year ended December 31, 2006 and other filings with the Securities and Exchange Commission ("SEC"), which are available at http://www.sec.gov, the SEC's website, and at http://www.rudolphtech.com, the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.