Rudolph Announces Installation of Multiple NSX Tools at WIN Semiconductors' GaAs Foundry

Business Wire, April 15, 2008

NSX System provides the throughput and defect sensitivity needed for a cost-effective inspection solution

FLANDERS, N.J. -- Rudolph Technologies, Inc. (NASDAQ: RTEC), a worldwide leader in process characterization solutions for the semiconductor manufacturing industry, announced today that seven NSX([R] )Series inspection tools were recently installed at WIN Semiconductors, the world's leading foundry that serves the global wireless information and networking markets. Following a competitive evaluation, WIN also acquired multiple licenses for Rudolph's Discover[TM] defect analysis/yield management software.

Based in Taiwan, WIN is the largest pure play gallium arsenide (GaAs) foundry in the world, specializing in the manufacture of radio frequency integrated circuits for cell phones and other communications applications. WIN's purchase was driven by the NSX 105 system's proven capability to deliver high-volume throughput while maintaining the sensitivity to identify defects as small as one micron.

In looking at this customer's specific needs, Rudolph recommended a combined defect analysis/wafer-level signature recognition software package for 24/7 process monitoring. This data management system will help WIN to quickly and easily trace patterns back to yield-killing process issues.

"We are truly gratified by WIN's selection of the NSX and the commitment they have demonstrated by their NSX orders over the course of the past year," said Mayson Brooks, Rudolph's vice president of sales. "As the leading GaAs manufacturer, they have helped us understand and respond to the specific needs of this rapidly-growing market segment. We look forward to continuing to serve those needs as they execute their plans for further expansion in the coming year."

"The information provided by the NSX has been critical in our efforts to meet our customers' requirements for fast delivery and high quality," commented Chin-chi Chang, Ph.D, WIN's associate vice president, Monolithic Microwaver Integrated Circuit Business Unit. "At the same time, it helps us meet our own internal needs to quickly achieve profitable process yields. Its unique combination of throughput and sensitivity to small defects has been especially valuable as we strive to keep pace with rapid growth in our segment."

The NSX Series is a fast, repeatable macro defect inspection solution used throughout the semiconductor device manufacturing process. Macro defects can be created during wafer manufacturing, probing, bumping, dicing, or by general handling, and can have a major impact on the quality of a microelectronic device. The NSX is specifically designed for the backend manufacturing environment where it can handle whole wafers and thinned wafers on film frames. It can quickly and accurately detect yield-inhibiting defects to provide quality assurance and valuable process information.

Rudolph's Discover([TM]) Software helps device manufacturers solve yield-related problems and maximize fab productivity. By bringing together all inspection, electrical test and manufacturing information in a single analysis framework, it enables users to quickly find the sources of killer defects and manufacturing problems. It correlates wafer sort data to defects identified earlier in the production process, thereby allowing resources to focus on determining the root cause of yield excursions as early as possible in the production flow. By automating defect analysis with flexible alarms, it allows time to be spent solving problems, instead of collecting data. And, by providing the industry's most comprehensive set of correlation methods, Discover provides the most thorough way to attack yield-related problems.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology, inspection and analysis solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

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This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act"). In some cases, you can identify those so-called "forward-looking statements" by words such as "may," "will," "would," "should," "expects," "plans," "anticipates," "believes," "feels," "estimates," "predicts," "potential," or "continue," or the negative of those words and other comparable words. Rudolph wishes to take advantage of the "safe harbor" provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph's control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph's business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph's Form 10-K report for the year ended December 31, 2007 and other filings with the Securities and Exchange Commission ("SEC"), which are available at http://www.sec.gov, the SEC's website, and at http://www.rudolphtech.com, the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.