Novellus Systems Orders CyberOptics Semiconductor Metrology Tools To Maintain VECTOR Systems Used in 300 mm Fabs

Business Wire, April 17, 2008

Gapping Tool Ensures Extremely Accurate Positioning of PECVD Showerhead for Greater Dielectric Film Uniformity, Slashes Maintenance Time

BEAVERTON, Ore. -- CyberOptics Semiconductor (CSI) today announced that Novellus Systems, a leading provider of advanced process equipment for the global semiconductor industry, has placed multiple orders for CSI's WaferSense[TM] Automatic Gapping System for use with Novellus VECTOR Express[TM] and VECTOR Extreme[TM], Plasma Enhanced Chemical Vapor Deposition (PECVD) Systems.

In PECVD systems, the gap between the showerhead and the semiconductor wafer plays a critical role in determining the uniformity of the deposited film. CSI's WaferSense Automatic Gapping System uses patent pending capacitive sensors to wirelessly provide real-time feedback through CyberOptics' GapView[TM] application software. With this tool, service engineers can quickly measure and adjust showerhead-to-platen gaps to significantly improve dielectric film uniformity and repeatability.

CyberOptics Semiconductor, developer of the gapping tool and other WaferSense[TM] precision metrology devices, collaborated with Novellus Systems to refine and customize its tool for use in Novellus' VECTOR PECVD systems. The real-time data provided by the Automatic Gapping System enables Novellus engineers to speed up maintenance cycles by as much as 60 percent.

"As an equipment supplier to the highly competitive semiconductor industry, Novellus is constantly looking for ways to make our equipment more productive for our customers," said Tim Archer, senior vice president and general manager of Novellus' PECVD Business Unit. "By arming our engineers with CyberOptics' innovative Automatic Gapping System, we have been able to deliver industry-leading dielectric film uniformity on VECTOR and at the same time significantly reduce maintenance costs and system downtime."

"Increasing process tool accuracy and precision is critical for 300mm fabs," said Craig Ramsey, general manager of CyberOptics Semiconductor. "We are extremely pleased to have had the opportunity to collaborate with Novellus during the development of this WaferSense application. The Novellus action to equip their engineers with Automatic Gapping Systems underscores the value these tools deliver to semiconductor fabricators worldwide."

The Automatic Gapping System is now available through Novellus and CyberOptics Semiconductor.

About CyberOptics Semiconductor:

CyberOptics Semiconductor designs and delivers precision products that measure critical parameters in semiconductor processes and equipment. CyberOptics Semiconductor is a subsidiary of CyberOptics Corp. (Nasdaq:CYBE), one of the world's leading providers of process yield and throughput improvement solutions for electronic assembly and semiconductor capital equipment companies. For more information, visit their web site at: www.CyberopticsSemi.com, e-mail CSsales@cyberoptics.com, or call 800-366-9131.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995:

Statements regarding the Company's anticipated performance are forward-looking and therefore involve risks and uncertainties, including but not limited to: market conditions in the global SMT and semiconductor capital equipment industries; increasing price competition and price pressure on our product sales, particularly our SMT systems; the level of orders from our OEM customers; the availability of parts required for meeting customer orders; the effect of world events on our sales, the majority of which are from foreign customers; product introductions and pricing by our competitors; unanticipated costs or delays associated with the transition of engineering and manufacturing for SMT Systems to Singapore and other factors set forth in the Company's filings with the Securities and Exchange Commission.

WaferSense[TM] Automatic Gapping System is a trademark of CyberOptics Semiconductor. VECTOR[R] is a registered trademark of Novellus Systems, Inc. VECTOR Express and VECTOR Extreme are trademarks of Novellus Systems, Inc