Rohm and Haas Opens $60 Million Immersion Lithography Facility

Business Wire,  July 8, 2008  

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Ultra-High NA 193 Immersion Scanner Centerpiece of 300 mm Capability

MARLBOROUGH, Mass. -- Rohm and Haas Electronic Materials (NYSE:ROH) today announced the recent opening of its new $60 million immersion lithography facility to support its extensive research and development of advanced 193 nanometer (nm) lithography materials used in the manufacture of semiconductor devices. The milestone was marked by an opening ceremony held on June 26 that was attended by employees, vendors and representatives from the local community.

The new facility, which is housed in the company's Advanced Technology Center (ATC) in Marlborough, MA, includes an ASML TWINSCAN[TM] XT: 1900Gi 193 nm Step and Scan system, a 300 mm coat/develop track and state-of-the art defect and metrology tools. The equipment and facility are fully installed and processing wafers.

"With the installation of the 193 nm immersion scanner and the infrastructure to process 300 mm wafers, we now have the same equipment our leading-edge customers are using," said Dr. Jim Fahey, president of Microelectronic Technologies, Rohm and Haas Electronic Materials, in remarks during the opening ceremony. "This investment gives us the ability to correlate with customers and optimize our materials for their applications beyond the 45 nm node."

The new immersion lithography facility supports the company's efforts to develop 193 nm photoresists and advanced patterning materials, such as anti-reflectants and topcoats, for immersion lithography. The capability will support development work being performed at the Marlborough site and other Microelectronic Technologies technology centers around the world.

"This large investment represents a significant commitment to our customers around the globe," said Fahey. "The facility will help accelerate innovation of materials, allowing us to respond to customer requests quickly as they develop the semiconductor devices that will power a whole new generation of electronics."

The $60 million investment in the ATC is in addition to the original $30 million facility, which opened in 2003.

Editor's note: Download hi-res images:

Caption: ASML TWINSCAN[TM] XT: 1900Gi 193 nm Step and Scan system in Rohm and Haas Electronic Materials' new $60 million 193 nm Immersion Lithography Facility, which was opened on June 26, 2008, at the company's Marlborough, MA, site.

http://www.rohmhaas.com/vocus/images/ASML_Scanner_RohmHaas.jpg

Caption: TEL[TM] LITHIUS[TM] i+ CLEAN TRACK[TM] coat and develop track with 300 mm wafer capability in Rohm and Haas Electronic Materials' new $60 million 193 nm Immersion Lithography Facility, which was opened on June 26, 2008, at the company's Marlborough, MA, site.

http://www.rohmhaas.com/vocus/images/LithiusTrack_RohmHaas.jpg

Forward Looking Statement

This release includes forward-looking statements. Actual results could vary materially, due to changes in current expectations. The forward-looking statements contained in this announcement concerning demand for products and services, sales and earnings forecasts, and actions that may be taken to improve financial performance, involve risks and uncertainties and are subject to change based on various factors, including the cost of raw materials, natural gas, and other energy sources, and the ability to achieve price increases to offset such cost increases, development of operational efficiencies, changes in foreign currencies, changes in interest rates, the continued timely development and acceptance of new products and services, the impact of competitive products and pricing, the impact of new accounting standards, assessments for asset impairments, and the impact of tax and other legislation and regulation in the jurisdictions in which the company operates. Further information about these risks can be found in the company's SEC 10-K filing of February 21, 2008.

About Rohm and Haas Company

Leading the way since 1909, Rohm and Haas is a global pioneer in the creation and development of innovative technologies and solutions for the specialty materials industry. The company's technologies are found in a wide range of industries including: Building and Construction, Electronics and Electronic Devices, Household Goods and Personal Care, Packaging and Paper, Transportation, Pharmaceutical and Medical, Water, Food and Food Related, and Industrial Process. Innovative Rohm and Haas technologies and solutions help to improve life every day, around the world. Based in Philadelphia, PA, the company generated annual sales of approximately $8.9 billion in 2007. Visit www.rohmhaas.com for more information. imagine the possibilities[TM]

About Rohm and Haas Electronic Materials

Rohm and Haas Electronic Materials develops and delivers innovative material solutions and processes to the electronic and optoelectronic industries. Focused on the circuit board, semiconductor manufacturing, advanced packaging, and flat panel display industries, its products and technologies are integral elements in electronic devices around the world. Additional information about Rohm and Haas Electronic Materials can be found at www.rohmhaas.com.

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