Rudolph Technologies Receives Multiple System Order for AXi 940 Inspection Modules

Business Wire, May 8, 2008

Strong early orders affirm value of new tool in production environment

FLANDERS, N.J. -- Rudolph Technologies, Inc. (NASDAQ: RTEC), a worldwide leader in process characterization solutions for the semiconductor manufacturing industry, today announced that it has received multiple system orders for its recently-introduced AXi 940 macro defect inspection module from a major chip manufacturer based in Singapore. This order for three systems reflects the success of an evaluation for advanced photolithography and CMP applications. Two systems shipped in April, with the third scheduled for June.

"The size of the order puts us ahead of our own projections for this tool," commented Scott Balak, AXi inspection product manager, "but more significantly, it affirms the design choices we made and the value this customer recognizes in the resulting product. Clearly, the productivity, accuracy and reliability of the new tool were apparent in this evaluation, and we expect rapid adoption of the AXi 940 in these important market segments."

The new AXi 940 module, the latest addition to Rudolph's industry-leading line of macro defect inspection tools, integrates the company's most advanced operational and analytical software with a fast new frontside inspection platform. This convergence of technology delivers the best available combination of defect sensitivity and inspection throughput. A completely redesigned software interface further enhances performance and productivity by streamlining nonproductive tool management operations. For example, recipe setup now takes less than five minutes and recipes can be created offline for one module while other modules remain in production. Together, with the E25([TM]) edge inspection module and the B20([TM]) backside inspection module, the AXi 940 completes the Explorer([TM]) Inspection Cluster--a multi-surface inspection system designed to deliver fast, accurate and reliable macro inspection at a low cost-of-ownership.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

Safe Harbor Statement

This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act"). In some cases, you can identify those so-called "forward-looking statements" by words such as "may," "will," "would," "should," "expects," "plans," "anticipates," "believes," "feels," "estimates," "predicts," "potential," or "continue," or the negative of those words and other comparable words. Rudolph wishes to take advantage of the "safe harbor" provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph's control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph's business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph's Form 10-K report for the year ended December 31, 2007 and other filings with the Securities and Exchange Commission ("SEC"), which are available at http://www.sec.gov, the SEC's website, and at http://www.rudolphtech.com, the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.