Rudolph Announces Appointment of New Board Member, Leo Berlinghieri

Business Wire, Sept 22, 2008

FLANDERS, N.J. -- Rudolph Technologies, Inc. (NASDAQ:RTEC), a worldwide leader in process characterization solutions for the semiconductor manufacturing industry, today announced the appointment of Leo Berlinghieri to the Rudolph Board of Directors, effective September 18, 2008.

Mr. Berlinghieri currently serves as a board member and Chief Executive Officer and President of MKS Instruments, Inc., a nearly 750 million dollar process control instruments company, since July 2005. He previously served in a variety of roles at MKS Instruments including President and Chief Operating Officer from April 2004 to July 2005, Vice President and Chief Operating Officer from July 2003 until April 2004, and Vice President, Global Sales and Service from November 1995 to July 2003. From 1980 to November 1995, he served in various management positions of MKS, including Manufacturing Manager, Production and Inventory Control Manager, and Director of Customer Support Operations.

"We are very pleased to welcome Leo to our board," commented Paul F. McLaughlin, Chairman and CEO. "Leo's extensive experience in the semiconductor equipment industry combined with his deep operations and M&A experience will provide Rudolph with valuable perspective as our company continues to grow. Along with this appointment, it is expected that Leo will serve on the board's Compensation Committee. We look forward to his contributions and guidance."

About Rudolph Technologies, Inc.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

Safe Harbor Statement

This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act"). In some cases, you can identify those so-called "forward-looking statements" by words such as "may," "will," "would," "should," "expects," "plans," "anticipates," "believes," "feels," "estimates," "predicts," "potential," or "continue," or the negative of those words and other comparable words. Rudolph wishes to take advantage of the "safe harbor" provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph's control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph's business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph's Form 10-K report for the year ended December 31, 2007 and other filings with the Securities and Exchange Commission ("SEC"), which are available at http://www.sec.gov, the SEC's website, and at http://www.rudolphtech.com, the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.