Manufacturing Industry
Axcelis, Shanghai University team up for R&D - The Fab Line - Brief Article
Electronic News, April 1, 2002 by Jeff Chappell
AXCELIS TECHNOLOGIES INC. HAS FORMED A COOPERATIVE research and development partnership with Fudan University in Shanghai, China, to explore advanced process and device development. The R&D program will take place at both Fudan University's Microelectronics Center in Shanghai and Axcelis' recently opened $31 million Advanced Technology Center in Beverly, Mass.
COPYRIGHT 2002 Cahners Business Information
COPYRIGHT 2002 Gale Group
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