Nikon says its scanners, steppers used to fabricate 90nm ICs - The Fab Line - Brief Article

Electronic News, April 1, 2002 by Jeff Chappell

NIKON CORP. SAID RECENTLY THAT A CHIPMAKER USED A combination of its NSR-305B argon fluoride (ArF) and NSR-204B krypton fluoride (KrF) scanners along with its NSR-SF100 i-line steppers to produce functional ICs with 90nm features. The ICs were fabricated on 300mm wafers. The NSR-305B, Nikon's second-generation ArF scanner, has a 0.68 numerical aperture (NA) and can process up to 78 300mm wafers per hour.

The NSR-204B, Nikon's fourth-generation KrF scanner, also has a 0.68 NA and processes as many as 80 300mm wafers per hour. The NSR-SF100 scan field stepper employs i-line illumination while matching the field size and throughput of the scanners, Nikon said.