Manufacturing Industry

Cluster Tool Licensing

Electronic News, Jan 11, 1999 by Jeff Dorsch

Plasma-Therm, Inc. last week reported the licensing of cluster tool technology from Applied Materials. The technology covers a number of areas regarding the basic architecture associated with the operation of cluster tool systems. This intellectual property will be utilized on Plasma-Therm's Versalock cluster tool, the company's flagship product. All systems sold in the past and all future Versalock products can make use of the technology covered in the agreement.

Jay Sasserath, the company's VP of strategic marketing, stated, "This agreement is paramount to Plasma-Therm, due to the significance that the Versalock product has in our future growth plans. The licensing agreement offers Plasma-Therm technology that is utilized by the world's largest manufacturer of cluster tools. We are able to apply this technology in all of our four served markets, maximizing the benefit to our customer base."

COPYRIGHT 1999 Reed Business Information, Inc. (US)
COPYRIGHT 2008 Gale, Cengage Learning

 

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