Manufacturing Industry
Sekidenko Introduces Deposition Rate Tuner
Electronic News, June 18, 2001
VANCOUVER, WASH.-based Sekidenko introduced its model 4000DRT Deposition Rate Tuner for online film-thickness prediction and uniformity tuning of dielectric plasma enhanced chemical vapor deposition (PECVD) processes. The 4000DRT combines optical pyrometry, proprietary electronics and a graphical interface, and works by acquiring temperature pro files to precisely characterize heat transfer between shower heads and the heater block during all process steps and as a tool ages with use, Sekidenko said.
The 4000DRT determines the unique temperature profiles of every step in a PECVD process based on the measured emissivities of the tool components, Sekidenko said.
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