Manufacturing Industry
Etec Incorporates NumeriTech Virtual Stepper into Aris
Electronic News, August 20, 2001
SAN JOSE-BASED NUMERICAL TECHNOLOGIES INC. (NumeriTech) is licensing its Virtual Stepper software to Etec Systems Inc. for use in Etec's Aris 100i 0.13-micron-and-below reticle inspection systems. With Virtual Stepper, the Aris tools can analyze a reticle image under simulated lithographic conditions, allowing customers to predict whether a defect is likely to be reproduced on a wafer, the companies said.
The agreement also allows Etec to use NumeriTech's (nasdaq: NMTC) modules for attenuated phase-shifting analysis, automated defect severity scoring, and alternating aperture phase-shift masks. Using the software will allow Aris to more readily analyze and determine nuisance defects from killer defects, Etec said. Etec is a subsidiary of Applied Materials Inc., Santa Clara, Calif.
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