Varian gets $18M MOS-12 order

Electronic News, Jan 3, 1994

PALO ALTO, CALIF.--Varian Associates received an order from Motorola worth nearly $18 million for semiconductor equipment worth nearly $18 million for semiconductor equipment which will be used in the MOS 12 fab in Chandler, Ariz. The equipment will produce microcontrollers and digital signal processors (DSPs) with 0.5 micron dimensions on a 200-millimeter (18-in.) fab line.

Deliveries on the order have begun, with first silicon expected in April. The order includes E500 medium-current ion implanters made by Varian and automated vertical furnances and Clean Track coater/developers made by Tokyo Electron Ltd. (TEL), which are marketed by Varian in North America.

The Motorola order was part of Varian's record quarter for semiconductor equipment new orders (EN, Dec. 6, 1993). Varian has also recently booked substantial orders from Hyundai Electronics, among others.

"Varian gear was selected for this important new facility because of the equipment's technical fit," said Brett Richmond, Motorola VP and director of MOS 12 operations. He also said Motorola was "impressed with the comprehensive customer support package Varian provides."

Separately, Varian and TEL reported that the MB2 physical vapor and chemical vapor deposition (PVD/CVD) system is in operation at four test sites in the U.S., Japan and Korean. The test sites weren't more closely identified. The MB2 was introduced last year (EN, July 12, 1993), and can be configured for PVD only, CVD only or PVD/CVD operation. The compact cluster tool is expected to be used in interconnect metallization of 16-and 64-megabit DRAMs and other submicron devices.

Boris Lipkin VP and GM of Varian's Thin Film Systems Division said, "The MB2 series will prove to be an important tool for chip makers needing the best deposition processes available plus maximum system realiability, cleanliness, productivity and attractive cost of ownership. The new tool complements Varian's 2000 PVD series and is designed for those situations that require a small-footprint, dedicated-application-style system.

"The M2000 remains the industry leader in process capability while advancing its performance in all of the key areas relating to cost of ownership. Once considered our ugly duckling, the M2000 has now turned into a swan." Hyundai ordered more than $17 million worth of M2000s (EN, Dec. 13, 1993). While Varian was making changes to the M2000, Applied Materials took the leading share in the PVD market.