Linear motion for high vacuum - Brief Article - Product Announcement

Electronics Times, July 24, 2000

Precision linear motion systems for ultra high vacuum conditions (UHV) have been introduced by Heason Technologies. They can withstand operation to 1 x 10-10 Torr vacuum levels.

Based on Bayside Motion Group linear slides and employing nanomotion non-magnetic piezo motors, the Heason UHV systems operate with low overall system magnetics.

All mechanical parts are UHV-rated to eliminate outgassing. Tungsten disulfide (TD2), a dry UHV compatible lubricant, is applied to all rolling element surfaces, to prevent wear without any vacuum grease.

These compact UHV systems (350mm long) provide full travel for 300mm wafers. Systems feature crossed roller bearings and non-contact linear encoders to 0.1 micro m resolution. The precision crossed rollers are made in stainless steel to reduce magnetic field effects.

Heason Technologies
Tel: 01243 545400
Fax: 01243 544590
Enquiry Number 542